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Reticle Macro AFVI
Model Name
SUN
Series
Semiconductor
Data
-
Manufacturer information
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ATI, Advanced Technology

Semi conductors, LED, PCB, Laser marking system and more

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Manufacturer
ATI, Advanced Technology
Brand
-
SKU
28471
Product Name
Reticle Macro AFVI
Model Name
SUN
Size
-
Weight
-
Product Details

Reticle Macro Inspection 

▪ Particle inspection on all area of reticle : 

   - Pellicle, Pellicle Frame, Pattern, Backside

▪ Multi scanning with vertical and oblique optical system

▪ Inspection of various reticles with 1 recipe 

   - No prior work for each mask needed

▪ Applicable to full automation

▪ 0.5um pinhole/particle detection in non-pattern area

▪ Optional function to distinguish particle position at top/bottom of pellicle

▪ Verifying review module included

ATI, Advanced Technology Reticle Macro AFVI SUN

ATI, Advanced Technology
Semi conductors, LED, PCB, Laser marking system and more
Thank you very much for your interest in Advanced Technology Inc.  ATI founded in 1996, we will devote ourselves to be one of global leaders in the field of Metrology and Inspection, which is getting more importance in every corner of high-tech business. ATI has specialized in Automated Metrology & Inspection System for various applications such as Semiconductors, LED, PCB and Photo-Voltaic Solar Industry. Our main customers are global manufacturing companies within such applications in the world. Based on our customer’s strong support, we will develop the field of Nano-Imaging and Nano-Metrology and through this field, we will contribute to improve manufacturing excellence of customers. Thank you very much for your concern. Sincerely yours,
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