Semi conductor and Hi tech equipment manufacturer, ALD, Coating solution
Rotating reactor ALD for shell coating on core structure
ㆍNano size powder coating system
ㆍReactor volume : > 100cc
ㆍFilter size : Variable(from 0.5µm~)
ㆍHorizontal rotation system
ㆍPrecursor canister : 4EA
ㆍProcess temperature : R.T. ~ 350°C (Reactor body : 230°C)
ㆍReactor rotation : DC Motor
ㆍRotation speed : 10 ~ 120rpm
ㆍBase pressure : under 20mTorr
ㆍApplication : Coating on particle, wire, tube, etc.