Semi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
The Hawk™ is a dry cleaning system for memory and logic device which provides a perfectly clean Si surface for deep contact plug integration and all of the Epi processes including Si, SiGe and III-V materials.
- Single Wafer Dry Cleaning Process with Gas Chemicals
- Eugene's Own Dual Rotated Spiral ICP Antenna Plasma Source
- High Radical Density
- Plasma Damage Free
- Wide Range of Process Parameters
- Controllable Map, Concave or Convex
- Excellent Uniformity
- Good Coverage at Deep Contact
- High Throughput