Semi conductor, Electronic parts, Solar cell, Organic EL, Display
▷ It is available a variety of thin film deposition therefore Suitable systems for research and development
Application
- Integrated optical devices and electronic components
- Hardness Coating
Specification
Configuration | Pre-treatment, Deposition |
Features | Drum type, Dual-side deposition |
Cathode | Planar Magnetron cathode |
Target | Metal, Oxide, TCO |