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MFC & MFC Readout
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Univac

Vacuum, Vacuum Evaporation, Coating, Sputtering, EBeam

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Manufacturer
Univac
Brand
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SKU
61984
Product Name
MFC & MFC Readout
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Product Details

MFC Controller

Process gas control is maintained by two mass flow controller.
One is configured for constant flow operation dedicated to ion source One is configured for constant flow or variable flow rate dedicated to the reactive evaporation process.
Both gas flow controller are integrated to the system host computer.
Each controller is capable of controlling a 0~100 sccm flow rate in fixed flow mode.

UnivacVacuum, Vacuum Evaporation, Coating, Sputtering, EBeam
Univac Ltd. was founded in1987 as Union Vacuum Technology, and since then developed into the specialized vacuum equipment manufacturer. The continuous and arduous endeavors under the motto "Pursuit of the Best Quality" has brought about the customers' appreciation of the excellency of the quality and enabled us to settle down the best vacuum applied equipment manufacturer. In order to efficiently meet with the potentially increasing trend of work orders from the 21st century world markets, Univac Ltd. are prepared with the massive production through the enlarged and augmented production facilities. All the members of Univac Limited will strive to do our best for the supply of products which satisfy the customers demanding requirements and needs.
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