CEDRAT TECHNOLOGIES
제품 상세 설명
Description
The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
Performances
Max No-load displacement (µm): 200; Dimensions (mm): 100*100*22; Resolution (nm): 20; Unloaded resonance frequency (Hz): 580;
Available options
Strain Gauges; Eddy Current Sensors, Vacuum
Status
Standard