스마트 액추에이터, 스마트 센서, 메카트로닉 시스템, 디텍션 시스템 등
Description
Fine Stepping Piezo Actuator (FSPA35XS) is a patented actuator that combines SPA technology with mechanical reduction. Step sizes lower than 100nm are achievable in fine displacement. Typical max speed for this FSPA is 200 um/s.
Performances
Actuation force: >100N; Travel range: 5mm; Typical lifetime: 100 cycles
Available options
Micro/Nano positioning, locking mechanism
Status
Preliminary