DURAHEAT Heat-Cool Unit
(2.2KW, 6.0KW with Cooling Coil of 0.5㎡)
The DURAHEAT Heat-Cool Unit provides high purity and reliable heating / Cooling of chemicals for semiconductors.
Special fusion welding of heater housing eliminates O-Rings and moving parts for only PTFE/PFA contact for wetted surfaces.
Specifications
- One-Body PTFE Heater Housing
- PVDF Shell
- PFA-jacketed heating element
- Power: 2.2KW, 6.3 KW, 208V, 10, 60H
- Cooling Coil: 0.5㎡ (Cooling Capacity: 5,700Kcal/Hr w/18 C Chilling Water)
- Ground Wire: Pt/ Ir
- Process Inlet / Outlet Fitting: 3/4″ Pillar Super 300
- Housing Dimension : 0225 x 519mm(H)
- Maximum Operating Pressure: 5.0Kg/Cm G @ 120°C
- Process Temperature Sensor: PT 100Ω
- Hi-Limit Sensor: PT 100Ω
- Thermal Fuse: SetPoint 167°C