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Alpha-Plus
Ion Pump
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Vacuum Components
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Description
- 2G(370x470) ~ 8G(2200x2500)까지 적용 - 최고의 Uniformity 구현 - 최적의 히터 배치로 Nozzle 막힘 방지 - One Body Crucible로 열 변형 최소화
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