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Multi-Stack SEG(Selective Epitaxial Growth) System
Model Name
Falcon™
Data
-
Manufacturer information
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EUGENE TECH

Semi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more

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Manufacturer
EUGENE TECH
Brand
-
SKU
10925
Product Name
Multi-Stack SEG(Selective Epitaxial Growth) System
Model Name
Falcon™
Size
-
Weight
-
Product Details

The Falcon™ : Multi-Stack wafer architecture with independent gas distribution and wafer rotation offers a higher productivity alternative to today’s much lower throughput solutions, with minimal to no pattern size effects.

 

Key Features

- Multi-stack Wafer Process

- Independently Controlled Gas Distribution Nozzle for Each Wafer 

- Wafer Rotation

- In-situ Chamber Cleaning

- Dry Pre-clean Chamber


Benefits

- High Throughput

- Excellent Within Wafer Uniformity - Thickness & Dopant Concentration

- Excellent Wafer to Wafer Uniformity - Thickness & Dopant Concentration

- Minimal Loading Effect

- Lower Particle Generation with In-situ Cleaning 


Applications

EUGENE TECH Multi-Stack SEG(Selective Epitaxial Growth) System Falcon™

EUGENE TECH
Semi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
EUGENE TECHNOLOGY CO., LTD provides innovative solutions that enable continued scaling of key semiconductor manufacturing processes while traditional semiconductor equipment makers face increasing limitations in the emerging nano technology era.   EUGENE TECHNOLOGY, starting with novel 'Nitride' processes, and soon adding Poly and Oxide steps, became the only company providing 'Single Wafer' diffusion solutions. Our flagship product line, the 'Blue Jay System' has been in volume production on core Front End of Line (FEOL) processes at leading global for 5 years, meeting stringent quality, technology, and productivity requirements. We are also investing heavily in advanced research and development (R&D) to continually expand our 'Diffusion Solution Provider' product offerings.   Launched with our own proprietary technology, we have grown rapidly to become a KOSDAQ-listed company in only 6 years. By following our own unique path, we've built the EUGENE TECHNOLOGY of today on the strength of our employee's conviction and dedication, focus on quality, competence in R&D, and an in depth understanding of industry technology trends.   As a dynamic, young, and growing company, we'll continue to move towards our vision to become a Top 10 global equipment company by expanding our market share aggressively in 2017-8.   EUGENE TECHNOLOGY is committed to pursuing semiconductor industry development with our leading technology, great partnerships with our customers, suppliers, and investors, and with the determination of our people.
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