Robot manufacturer, Industrial robot, Motion controller, Servo system, Intelligent robot, Service robot and more
Wafer Transfer Robot / Vacuum (AR-300 series)
: Smooth handling by AC servo motor with optimal acceleration/deceleration control
▣ AR-WV300 (Double arm) / AR-SV300 (Single arm)
▣ Wafer Size : ~300mm
▣ A & B - axis : 510mm / Φ axis : 330 deg. / Z axis : 50mm (Single arm 20mm)
▣ Transportable weight(kg) : 1kg (Single arm 0.7kg)