Product
(33)
크린룸도입시 고려사항 / 사용 및 유지방법
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Thermo Hygrostat System
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Dehumidifying System
DC Series
Freezing & Refrigeration System
-GHP System
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LCD 비접촉반송 및 세정
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웨이퍼 반송 및 핸들링
-CDA (Clean Dry Air) System
-PV (Process Vacuum) System
-Gas System
-DI Water System
-Exhaust System (ACID)
-PCW (Process Cooling Water) System
-Exhaust System (Heat / Gen)
-Exhaust System (Organic)
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