Bench Top Sputter Series by Korea Vacuum Tech - Komachine Supplier Profile and Product List

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Bench Top Sputter Series

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Bench Top

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Korea Vacuum Tech

Vacuum system manufacturer, Vacuum evaporation, Etching equipment, Washing equipment, Vacuum parts and more

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Manufacturer

Korea Vacuum Tech

Brand

SKU

88726

Product Name

Model Name

Bench Top Sputter Series

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Product Details

Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary

addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact

convenient size, easy operation and affordability, functionality is in no way sacrificed.

The modular design of the Intelsi-S makes it highly configurable to meet specific

customer needs and numerous stock options are also available. A fully automated

Laptop PC helps round out this extremely usable yet robust diminutive package.

Advantages

≻ Easy to operate

≻ No cooling required

≻ Precise reproducible coating

≻ Fully adaptable to a wide range of specimens

≻ Easy loading and unloading of specimens

Features

≻ Extreme versatility

≻ High capacity vacuum pumping

≻ Fully automated PC control

≻ Capable of producing very thin resultant films

≻ Suitable for reactive gas deposition (O2, Ne etc.)

≻ Gold coating for SEM

≻ Metal Deposition such as Al, Au and so on

Specifications

	Intelsi – S	Intelsi - ST
System Dimensions	501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6”
	35kg (77.2 lb)
Electrical / Compressed Air	110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2
Target Size	2 inch (50.8mm) diameter
Pumping Capability	Rotary Pump	Rotary & Turbo Molecular Pump
Gas Supply Unit	Metering Valve
	DC Power Supply
Ultimate Pressure	Less than 5.0E-3Torr	Less than 5.0E-6Torr
	Auto pumping, Auto process and auto vent using PLC & Simple buttons
Deposition Source	Sputtering Cathode 1EA
Vacuum Gauge(Reading Range)	ATM to 5.0E-3Torr	ATM to 5.0E-6Torr
Throttle Valve	N/A	On/Off type
Film Thickness Uniformity	Less than ±5%
Optional Items	Substrate rotation & Z-motion, Substrate Heating, MFC RF Power supply, QCM thickness Monitor

Korea Vacuum TechVacuum system manufacturer, Vacuum evaporation, Etching equipment, Washing equipment, Vacuum parts and more

KVT has researched many plasma related studies. The main products are vacuum deposition systems (PVD,CVD), etcher, cleaning systems for R & D and device mass production, thermal process and customized vacuum systems. KVT has produced vacuum systems for faster and more convenient process, and especially fully automated systems has been developed for device mass production. We have enhanced export to US, Japan, and have got good reputation about quality. Also KVT has KA A9001/ISO 9001/EN ISO 9001 related design, development, production, and service.

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