Semi conductor equipment manufacturer, EFEM, Vacuum cluster tool, ATM Robot, Vacuum Robot, LPM and more
We have been providing the vacuum cluster tool which is used in the semiconductor front-end process equipments of the semiconductor industry since 2000. Now, we have expanded the business into a Wafer Bonding System, which is new growing in the market, through continuous efforts for the development of technologies.
This is used for Wafer to Wafer bonding / de-bonding. It is the key process used in the manufacturing of next-generation TSV 3D IC, V-LED Chip and CMOS image Sensors of the Smartphone Cameras.
We will continually provide our customers with new technologies-applied products having the best performance and efficiency.