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Controller
◾Sensor : SHIM Gauge, ATM SHIM Gauge
◾Measurement Range : SHIM Gauge 1000Torr ~ 1.0E-03Torr, ATM Gauge 1500Torr ~ 1.0E-03Torr
◾Standards Analog Output & 2-SetPoints Relay Output
◾Optional : RS232, RS422/485
◾Unit : Torr & Pascal
※ Gauge axis must be horizontal to provide accurate measurement above 1 Torr
SHIM Gauge
◾Measurement Range:1000 ~ 1.0E-3Torr
◾Gas Calibration : Air or N2
◾Bake Out Temp : 100℃ in Air or Vacuum
◾Cable : 9pin D-sub Connector, Multi Conductor Shield Cable
◾Cable Length : 3m(Standard), 50m(Maximum)
◾Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33"CF, 1/4"VCR
ATM SHIM Gauge
◾Measurement Range:1500Torr ~ 1.0E-03Torr
◾Gas Calibration : Air or N2
◾Bake Out Temp : 100℃ in Air Vacuum
◾Cable : 9pin D-Sub Connector, Multi Conductor Shield Cable
◾Cable length : 3m(Standard), 50m(Maximum)
◾Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33" CF, 2.75"CF, 1/4" VCR
◾Gauge Axis must be horizontal to provide accurate measurement above 1 Torr