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Pressure Range
◾Maximum Measurement Limit : 1.0E-10Torr
◾Minimum Measurement Limit : 1.0E-03Torr
◾Available Cable length : 3m(10Ft.) ~ 50m(200FT.)
◾Analog Output : 1V/decade, 0 ~ 7VDC
◾Power Input 100/115/230℃ ± 10% VAC 250 Watts, 50 or 60Hz
SHIM Gauge Pressure Range for N2/Air, ATM SHIM Gauge
◾Measurement Range : SHIM Gauge 1000 ~ 1.0E-3Torr, ATM Gauge 1500 ~ 1.0E-3Torr
◾Analog Output : 1V/decade, 0 ~ 6VDC
◾Cable length : 3meter(Standard),50meter(Maximum)
◾Fitting : 1/8NPT, NW16KF, NW25KF, 15m O.D, 1.33"CF, 2.75"CF, 1/4"VCR
◾Gauge axis must be horizontal to provide accurate measurement above 1 Torr
1. Interface Module
- RS 232, RS485,422
2. Additional Ionization Gauge.
- Second Ionization Gauge is available
3. Remote Operation
- Remote I/O Option
4. Selectable Process 6-Setpoints