Mask aligner and Spin coater equipment manufacturer
Easy operation & Installation
Handling Substrates of Various sizes
PLC control with Touch screen panel
specification
Type | PC / PLC control Manual (Mask Aligner) |
---|---|
Mask size | up to 7" x 7" |
Substrate size | piece to 6" |
UV lamp & Power | 350W & power supply |
Uniform beam size | 6.25" x 6.25" |
Beam Uniformity | <±3% |
Beam wavelength | 350 ~ 450nm |
365nm Intensity | ~25mW/cm2 |
Alignment accuracy | 1um |
Process resolution | 1um@1um PR thickness with vacuum contact |
Process mode | Soft, Hard, Vacuum contact & Proximity |
Substrate chuck moving | x,y,z & θ |
Options | Anti-Vibration table |
IR BSA | |
UV Intensity meter | |
etc. |