Mask aligner and Spin coater equipment manufacturer
Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes
specification
Type | PC control semi auto |
---|---|
Mask size | up to 7" x 7" |
Substrate size | piece to 6" |
UV lamp & Power | 350W & power supply |
Uniform beam size | 6.25" x 6.25" |
Beam Uniformity | <±4% |
Beam wavelength | 350 ~ 450nm |
365nm Intensity | ~25mW/cm2 |
Alignment accuracy | 1um |
Process resolution | 0.8um@1um PR thickness with vacuum contact |
Process mode | Soft, Hard, Vacuum contact & Proximity |
Substrate chuck moving | x,y,z & θ |
Options | Anti-Vibration table |
CCD BSA | |
UV Intensity meter | |
UV-LED(365nm) exposure module | |
etc. |