product Image
Dual Seal Type
Model Name
V77 Series
Series
Rectangular Gate Valves
Data
RECTANGULAR DOOR VALVE
Manufacturer information
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PRESYS

Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more

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Manufacturer
PRESYS
Brand
-
SKU
60328
Product Name
Dual Seal Type
Model Name
V77 Series
Size
-
Weight
-
Product Details

Application 
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/frat panel precess
- All other cluster vacuum systems 
 
Features 
- Semi standard application 
  (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free 
- Realization of exact L-motion
- Easy maintenance 

 
Options 
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Double gate seal door valve available 
 

 

PRESYS Dual Seal Type V77 Series



Pressure range

1 x 10-9 mbar

Leak rate : body, seat

< 1 x 10-9 mbar.ℓ/s

Differential pressure on the gate

 ≤ 1.0 bar in either direction

Material

Gate

AL6061

Valve actuator

SS304, AL6061

Seal Materials

FKM(VITON)

Temperature

Valve actuator

60℃

Operation

Double acting

Cycle until first service

3 million

Position sensor

SMC (D-A93)



PRESYS
Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more
The engineering staff of Presys, Inc. has been incessantly conducted researches based on the core basic technology that is required in the high-tech simeconductor industry. With a sense of mission as "Need Company," the staff has been creating a new concept based on high-degree vacuum system and green growth technology in order to meet New Millennium customers' expectaitons. With this base technology, our company developed and produced the new concept of product processing technology to become a compnay that fits well to the country's title of "the world's best semiconductor device and FPD production. Also, we are doing our best efforts to expand the new growth engine industry. We promise to assemble our accumulated Know-How and Innovative Venture spirit in order to provide satisfactory customer support and to invest consistently on R&D until our company develops into one that holds the world's best technology and realizes the next generation World Best. I would like to return thatnks to our customers and affiliated companies and ask for further support.
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