Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
Consisting of dual channel, each channel can process a broad range of manufacturing temperatures from -20 ℃ to + 80 ℃.
Realize low-electricity energy saving chiller via real-time refrigerant cascade PID flow control without the constraint of heater control for a specific temperature range
Semiconductor / LCD / LED Main Equipment
ITEM | SPECIFICATION | |
Channel | CH1 | CH2 |
Temp Range | -20 ~ 80℃ | 10 ~ 80℃ |
Cooling Type | Refrigerant | Refrigerant |
Cooling Capa | 6.0kW at 20℃ | 6.0kW at 20℃ |
Reservoir Volume | 18.0 Liters | 18.0 Liters |
Consisting of dual channel, each channel can process a broad range of manufacturing temperatures from -20 ℃ to + 80 ℃.
Simultaneous manufacturing control of equipment and flow control system response
Implementation of low-electricity energy saving chiller by changing heater control method and real-time refrigerant cascade PID flow control
Semiconductor / LCD / LED Main Equipment
ITEM | SPECIFICATION | |
Channel | CH1 | CH2 |
Temp Range | -20 ~ 80℃ | 30 ~ 80℃ |
Cooling Type | Refrigerant | Heat Exchanger |
Cooling Capa | 12.0kW at 20℃ | 6.0kW at 50℃ |
Reservoir Volume | 30.0 Liters | 30.0 Liters |
Consisting of dual channel, each channel can process a broad range of manufacturing temperatures from -20 ℃ to + 80 ℃.
Realize energy saving chiller by changing cooling capacity and heater control method as well as real time refrigerant Cascade PID flow control
Semiconductor / LCD / LED Main Equipment
ITEM | SPECIFICATION | |
Channel | CH1 | CH2 |
Temp Range | -20 ~ 80℃ | -10 ~ 80℃ |
Cooling Type | Refrigerant | Combi |
Cooling Capa | 9.0kW at 20℃ | 9.0kW at 20℃ |
Reservoir Volume | 15.0 Liters | 15.0 Liters |
Consisting of triple channels, each channel can process a broad range of manufacturing temperatures from -10 ℃ to + 80 ℃.
Simultaneous manufacturing control of equipment and flow control system response
Reduced coolant consumption by optimized design of large-size cooling capacity and reservoir volume
Low electricity energy saving chiller
Semiconductor / LCD / LED Main Equipment
ITEM | SPECIFICATION | ||
Channel | CH1 | CH2 | CH3 |
Temp Range | 10 ~ 60℃ | 40 ~ 80℃ | 10 ~ 60℃ |
Cooling Type | Refrigerant | Heat Exchanger | Refrigerant |
Cooling Capa | 10.0kW at 10℃ | 7.0kW at 40℃ | 12.0kW at 20℃ |
Reservoir Volume | 30.0 Liters | 30.0 Liters | 12.0 Liters |
Consisting of single channel, it can process a broad range of manufacturing temperatures from -10 ℃ to + 80 ℃.
Realize energy saving chiller by changing cooling capacity and heater control method as well as real time refrigerant Cascade PID flow control
Semiconductor / LCD / LED Main Equipment
ITEM | SPECIFICATION |
Channel | CH1 |
Temp Range | -10℃ ~ 80℃ |
Cooling Type | Refrigerant |
Cooling Capa | 5.0kW at 20℃ |
Reservoir Volume | 13.5 Liters |
