Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
System that processes toxic gas generated from semiconductor manufacturing process using direct flame treatment through LNG combustion
Periodic PM cycle extension using scraper system
Safety certification via safety authentication design
ITEM |
SPECIFICATION |
Dimension(W x D x H) |
720mm x 850mm x 1680mm |
Power |
208 VAC, 3 Phase, 3A |
Capacity |
400 SLM |
Utilities |
LNG, O2, CW, PCW, CDA, N2 |