Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
System that decomposes the target gas generated from the semiconductor manufacturing process using extreme high temperature JET using PLASMA
High decomposition efficiency of PFC GAS (99%)
ITEM |
SPECIFICATION |
Dimension(W x D x H) |
720mm x 850mm x 1680mm |
Power |
208 VAC, 3 Phase, 3A |
Capacity |
300 SLM |
Utilities |
LNG, O2, CW, PCW, CDA, N2 |