Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
Precision temperature and humidity control system of semiconductor photo process track facility
Low electricity energy saving system
Production based on optimized design (stability and operational convenience)
ITEM |
SPECIFICATION |
TEMPERATURE CONTROL RANGE |
THC : 20 ~ 25℃ (±0.05 ℃) |
HUMIDITY CONTROL RANGE |
THC : 40 ~ 45% (±0.25%) |
FLOW RATE |
88.5 ℓ/min |
WIND SPEED |
61㎥/min |