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Fully Automated, Topside or Backside Mask Aligner for Production
Model Name
6000 FSA
Series
OAI Mask Aligner
Data
-
Manufacturer information
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Seimyuing Vactron

UV exposure, UV curling machine, Laminator, UV lamp, UV LED lamp

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Manufacturer
Seimyuing Vactron
Brand
-
SKU
36918
Product Name
Fully Automated, Topside or Backside Mask Aligner for Production
Model Name
6000 FSA
Size
-
Weight
-
Product Details

For: Semiconductors, MEMS, Sensors, Microfluidics, IOT, Packaging With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with a new elite class of production photolithography equipment.

Built on the venerable OAI modular platform, the Series 6000 has topside or backside alignment that is fully automated with sub-micron resolution which delivers performance that is unmatched at any price.

The Aligners have Advanced Beam Optics with better than ±3% uniformity and a throughput of 180 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.

With superb process repeatability, the Series 6000 is the perfect solution for all production enviroments. Choose either top side or optional back side alignment which uses OAI's customized pattern recognition software that is Cognex based. For the total lithography process, the Seriesl 6000 can be integrated seamlessly with cluster tools. OAI's new production mask Aligners are the total package.

BENEFITS
① Fully Automated
② Topside Alignment
③ Optional: Bottomside Alignment
④ DUV to NUV
⑤ Cluster Tool Integration
⑥ Customized Software

SPECIFICATIONS

Exposure System
Exposure Modes Vacuum contact Hard contact Soft contact Proximity (2μ gap)
Advanced Beam Optics
Uniform Beam Size 50mm - 200mm square/round
200mm - 300 mm square/round
Uniformity Better than ±3%
Camera Dual Camera with CCTV with Expanded Depth of Field
Alignment System
Pattern Recognition Cognex visionPro¹™ with OAI customized software
Alignment Accuracy 0.5μ topside
1.0μ with top to bottom optional backside alignment
Pre-alignment Accuracy Better than ±50μ
Auto-alignme Top to bottomside
Topside
Wafer Handling
Substrate size 50mm – 200mm round or square or 200mm-300mm round or square
Thin wafers Down to 100Μ
Warped Wafers Up to 7mm-10mm
Thick & Bonded Substrates Up to 7000μ
Robotics Single and dual arm wafer handling
Run-out compensation Standard software or optional thermal chuck
Wafer size conversion 5 minutes or less
Throughput 1st mask 180 wafers per hour - subsequent 75-100 wafers per hour
Wedge Effect Leveling 3 point or optional non-contact
Available Options
IR Auto-align,Cassette Mapping365nm LED Exposure Light Source Temperature Controlled Wafer Chuck Integrated Mask Management Control Integrated Lithography Cluster for Full Lithography Process Environment Control with SMIF or FOUP Interface Modules Non-contact Leveling Edge Gripping

Seimyuing Vactron
UV exposure, UV curling machine, Laminator, UV lamp, UV LED lamp
Since 1988, S.M.V. has been keeping the Korea’s Top references and Leading Technology manufacturer and still continued has been keeping pace and developing for 3 main advanced industrial technology with 26 years accumulated know-how for UV Technology as; UV Exposure equipment business field for PCB, TSP, LCD and OLED field division as called the backbone of the electronic industry etc, UV Cuting equipment business field for Furniture (Wood, Timber), Printing, Packing, Consumer goods, Electronics, Telecommunications, Telecom, Automation and Environment-friendly industries etc, UV Light source development business field for the high-tech industries. In particular, Have a sens of pride that the subject of national policy were well performed brilliantly and at the same time, we are having the technology and price competitiveness can be competitive with world’s leading companies. We came to be a domestic UV industry’s stepping stone in every hump, with unity of our loyal employee’s passion and honesty. The 21st century is requiring a leading technology fusion, and industrial 4G is demanding us a new crisis and challenge. Thus, based on the accumulated our Know-how, we are developing our core technology we holds to apply the skills and values of innovation and creative engineering to prepare into the international competitiveness system for the second leap.
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