Horizontal and vertical diffusion, PECVD and LPCVD furnaces
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SVCS Process Innovation designs and manufactures batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for the semiconductor and photovoltaic industries, or related R&D institutes. Other products include various gas source systems like gas cabinets, valve manifold boxes and custom equipment gas manifolds. The heart of all SVCS tools is in-house designed control system that is often used for refurbishment of third party equipment.