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SIX FACES HEATER TYPE (SQUARE TYPE CHAMBER)
Heat zone | 900W x 1100D x 850H ※Can be changed according to consumer needs |
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Max temp | 1850℃ |
Degree of vacuum | Around 10(-5) torr Diffusion Pump + MBP + Rotary Pumping |
Used gas | N2, Ar, Vacuum |
Utility | Power 400KVA, cooling water, process gas, air |
Heater | Graphite Rod Type Heater Top/bottom/left/right/front/rear 6 faces heating method |
Insulating material | Graphite molded insulating material |
Zone control method | 4 Zone control method |
Inner Box | Attaching tungsten plate inside the graphite inner box |
Cooling device | Forced cooling method was attached |