Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell
Overview
Collimates an emissive photon beam and directs it to the subject of experiment.
Remote and precise 5-axis control in directions of x, y, roll, pitch, and yaw UHV sealing induced by aluminum wires
Specifications
Mirror Manipulator | Range | 12mm(0 ~100kgf) |
Resolution | 0.02 ㎛ | |
Precision | 0.1kgf(force sensor) | |
Vacuum Performance | less than 1x10-9 mbar | |
Maximum Bake-Out Temp | 120℃ | |
Mirror Length | 100~1400mm | |
Axis Actuator Type | 5P Harmonic Step Motor | |
Tangential Slope Error | less than 2μrad |
Pitch (rotation about X axis) | Range | ±2.54° |
Resolution | 0.018″ | |
Roll (rotation about Y axis) | Range | ±2.6° |
Resolution | 0.094″ | |
Yaw (rotation about Z axis) | Range | ±2.03° |
Resolution | 0.007″ | |
X direction | Range | ±20.0 mm |
Resolution | 0.02 ㎛ | |
Z direction | Range | ±25.0 mm |
Resolution | 0.05 ㎛ |