Plasma Cleaner, Oven, Cooperative Robot, etc
This systemprovides unmanned service on the automatic due outon capillary in semiconductor manufacturing, by identification numbers or passwords of people who are registered administrators or approved operators by the administrators.
Maximum six type of capillary management by six different bowl feeder
Database with automatic In/Out control through
Simple operation by touchscreen
Handy user access by barcodes and passwords
Database that checks on save and usage status in real time
Grouping capillaries by their types
Saving labor cost by automatic managing system
LAN network & e-CIM