Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
≻ Excellent Thickness Uniformity
The KVE Series KVE-2000L System provide excellent thickness uniformity of resultant films.
≻ Always maintain high vacuum degree in process
These systems have a process chamber and a loadlock chamber. Loadlock chamber is used
for sample loading. So process chamber is always maintained high vacuum state
≻ Semi-auto system control by PLC
Process Chamber | Stainless steel |
Vacuum Pumping Station | Cryo / TMP |
Loadlock Chamber | Top door, Stainless steel |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4inch ~ |
Vacuum Gauge Controller | ATM ~ 1.0E-10Torr |
Power Supply Unit | 6kW, 8kW, 10kW |
Crucible Size | 4cc, 7cc, 15cc, 25cc |
Pocket Number | Single, 4, 6 |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
System Control | PLC based Semi-auto |
Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
≻ Excellent Thickness Uniformity
The KVE Series KVE-E2000 System provide excellent thickness uniformity of
resultant films even for substrates that have the same diameter as the sputtering cathode assembly
≻ No loadlock chamber
≻ Semi-auto system control by PLC
Process Chamber | Stainless steel |
Vacuum Pumping Station | Cryo / TMP |
Loadlock Chamber | |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4inch ~ |
Vacuum Gauge Controller | ATM ~ 1.0E-10Torr |
Power Supply Unit | 6kW, 8kW, 10kW |
Crucible Size | 4cc, 7cc, 15cc, 25cc |
Pocket Number | Single, 4, 6 |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
System Control | PLC based Semi-auto |
Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
Features
≻ Excellent Thickness Uniformity
The KVE Series E-Beam Evaporator System provide excellent thickness uniformity of
resultant films. if you deposit the thin film under same conditions, you will get a thin films
of same characteristics.
≻ Full Auto control
These systems provide the ‘auto button’ to user for convenience of user. Fully automated
vacuum process control system.
≻ Always maintain high vacuum degree in process
These systems have a process chamber and a loadlock chamber. Loadlock chamber is used
for sample loading. So process chamber is always maintained high vacuum state.
Process Chamber | Stainless steel |
Vacuum Pumping Station | Cryo / TMP |
Loadlock Chamber | Top door, Stainless steel |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4inch ~ |
Vacuum Gauge Controller | ATM ~ 1.0E-10Torr |
Power Supply Unit | 6kW, 8kW, 10kW |
Crucible Size | 4cc, 7cc, 15cc, 25cc |
Pocket Number | Single, 4, 6 |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
System Control | PLC based PC auto |
Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
Features
≻ Excellent Thickness Uniformity
The KVE Series E-Beam Evaporator System provide excellent thickness uniformity of
resultant films. if you deposit the thin film under same conditions, you will get a thin films
of same characteristics
≻ Full Auto control
These systems provide the ‘auto button’ to user for convenience of user. Fully automated
vacuum process control system
Specifications
Process Chamber | Stainless steel |
Vacuum Pumping Station | Cryo / TMP |
Loadlock Chamber | |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4inch ~ |
Vacuum Gauge Controller | ATM ~ 1.0E-10Torr |
Power Supply Unit | 6kW, 8kW, 10kW |
Crucible Size | 4cc, 7cc, 15cc, 25cc |
Pocket Number | Single, 4, 6 |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
System Control | PLC based PC auto |