제품 사양
- Laser, Power supply, X-Y-Z-R stage,
- Vision system, System control S/W
제품 설명
Model | LPS-DF250 |
Wavelength | 266 nm |
Pulse repetition rate | Single shot to 100㎑ |
Power | ≥ 3W @30kHz |
Pulse stability | < 5 % rms up to 30kHz |
Beam divergence | < 0.3 mrad |
Cooling | Closed loop |
Demension | 1600mm(W) x 1500mm(L) x 1700mm(H) |
Weight | 1500kg |
Electricity | 220V, 3PH |
Vision | FOV : 1.4 x 1.9 (mm) |
- High precision optics and optimized processing system
- Si Sapphire scribing
- Scribing broken wafer
- Alignment by X-Y-Z-R stages and vision
- applied to dxf file