Clean Class [ISO Class]
ISO
Class |
Maximum Number of Particless in Air | |||||
( particles in each cubic meter equal to or greater than the specified size ) | ||||||
Particle size | ||||||
> 0.1μm | > 0.2μm | > 0.3μm | > 0.5μm | > 1μm | > 5μm | |
ISO Class 1 | 10 | 2 | ||||
ISO Class 2 | 100 | 24 | 10 | 4 | ||
ISO Class 3 | 1,000 | 237 | 102 | 35 | 8 | |
ISO Class 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
ISO Class 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
ISO Class 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO Class 7 | 352,000 | 83,200 | 2,930 | |||
ISO Class 8 | 3,520,000 | 832,000 | 29,300 | |||
ISO Class 9 | 35,200,000 | 8,320,000 | 293,000 |