(15)
ICP-RIE PSS Etcher for HBLED
SIE 2031
ICP Etcher
SIE 601
RIE Etcher
SRE 601
Cluster Sputter with Multi Target Chamber
SCS 110
Cluster Sputter with Multi Target Chamber
SSLS 120
Multi Purpose 1:1 Direct Sputtering System with Multi Target
SSLS 130
Vertical Inline Sputtering System
SVIS G8
SHTR W900
Evaporation System for Thing film deposition, etc.
SE 805
E-Beam & High Performance Ion Gun Combination
SE 805G
PECVD System for SiOx/SiNx/a-Si
SPC 601
PECVD System for SiOx/SiNx/a-Si/DLC
SPC 603
Anti-stiction Layer Coating System
SVS Series
Microwave Asher
SMA 601
Coating Service
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