Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
SIZE | CONNECTION | ||
11 | 1.125″ | W | W-Seal |
15 | 1.5″ | C | C-Seal |
Removal Rating | ≥0.0025µm | |
---|---|---|
Retention | Greater than 99.9999999% Removal of all particles down to 0.0025µm | |
Rated flow @ 109 | 30 SLPM | |
60 SLPM | ||
120 SLPM | ||
Materials | Filter element | 316L Stainless steel, Hastelloy C276 |
Electro polished housing | SM/DM 316L Stainless steel, Hastelloy C22 | |
Element Operating Conditions | Maximum inlet pressure | 0.98 MPa (10kgf/cm2) at 20°C |
Maximum differential pressure | 0.7 MPa (7kgf/cm2) at 20°C | |
Maximum operating temperature | 460°C (Inert gas) | |
Helium Leak Rating | 1 x 10-9 atm cc/sec | |
Surface Finish Interior | ≤ Ra 5μin |
Size | Seal Type | Part Number | A/mm | B/mm | C/mm | D/mm | H/mm |
---|---|---|---|---|---|---|---|
1.125″ | W-Seal | IGS 11W-30 | 20 | 21.8 | 28.6 | 21.5 | 45 |
IGS 11W-60 | 20 | 21.8 | 28.6 | 21.5 | 58 | ||
C-Seal | IGS 11C-30 | 21.8 | 21.8 | 28.6 | 21.5 | 45 | |
IGS 11C-60 | 21.8 | 21.8 | 28.6 | 21.5 | 58 | ||
1.5″ | W-Seal | IGS 15W-60 | 26 | 30 | 39 | 27.5 | 62 |
IGS 15W-120 | 26 | 30 | 39 | 27.5 | 96 | ||
C-Seal | IGS 15C-60 | 30.2 | 30.2 | 39 | 27.5 | 62 | |
IGS 15C-120 | 30.2 | 30.2 | 39 | 27.5 | 96 |