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IGS Gas Filter
Model Name
FLT-IGS Series
Series
Filter & Diffuser
Data
-
Manufacturer information
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ASFLOW

Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more

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Manufacturer
ASFLOW
Brand
-
SKU
53514
Product Name
IGS Gas Filter
Model Name
FLT-IGS Series
Size
-
Weight
-
Product Details

 ASFLOW IGS Gas Filter FLT-IGS Series

SIZE CONNECTION
11 1.125″ W W-Seal
15 1.5″ C C-Seal

 

Specifications

Removal Rating ≥0.0025µm
Retention Greater than 99.9999999% Removal of all particles down to 0.0025µm
Rated flow @ 109 30 SLPM
60 SLPM
120 SLPM
Materials Filter element 316L Stainless steel, Hastelloy C276
Electro polished housing SM/DM 316L Stainless steel, Hastelloy C22
Element Operating Conditions Maximum inlet pressure 0.98 MPa (10kgf/cm2) at 20°C
Maximum differential pressure 0.7 MPa (7kgf/cm2) at 20°C
Maximum operating temperature 460°C (Inert gas)
Helium Leak Rating 1 x 10-9 atm cc/sec
Surface Finish Interior ≤ Ra 5μin

 

Dimensions

Size Seal Type Part Number A/mm B/mm C/mm D/mm H/mm
1.125″ W-Seal IGS 11W-30 20 21.8 28.6 21.5 45
IGS 11W-60 20 21.8 28.6 21.5 58
C-Seal IGS 11C-30 21.8 21.8 28.6 21.5 45
IGS 11C-60 21.8 21.8 28.6 21.5 58
1.5″ W-Seal IGS 15W-60 26 30 39 27.5 62
IGS 15W-120 26 30 39 27.5 96
C-Seal IGS 15C-60 30.2 30.2 39 27.5 62
IGS 15C-120 30.2 30.2 39 27.5 96

ASFLOW IGS Gas Filter FLT-IGS Series 1

 

Product Dimension (mm)

ASFLOW IGS Gas Filter FLT-IGS Series 2

ASFLOW
Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
ASFLOW Co., Ltd is a company specialized in the production of semiconductor equipments and high purity valves used for high purity gas lines. We are the leading material & components group in Korea which contributes to the industry. ASFLOW, first founded in May, 2000 has succeeded in the domestic production of high purity valves that were once available only through importation. With the provision of valves our company will expand not only in the domestic market, but also to China, Japan and Europe to affirm our brand image and further develop as the world leading company. Beginning with registering our tube, fitting valves with Samsung Electronics and Skhynics in 2005, we have expanded our lineup by adding valves and regulators and have produced new products such as filter and diffusers for a unique portfolio. ASFLOW will constantly develop by expanding internally through innovation and become a bigger business.
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