Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
SIZE | CONNECTION | ||
04 | 1/4″ | MV | Male |
06 | 3/8″ | LOK | Lok |
08 | 1/2″ | BW | Butt Weld |
12 | 3/4″ |
Removal Rating | ≥0.0025µm | |
---|---|---|
Retention | Greater than 99.9999999% Removal of all particles down to 0.0025µm | |
Rated flow @ 109 | 15 SLPM | |
50 SLPM | ||
150 SLPM | ||
300 SLPM | ||
Materials | Filter element | 316L Stainless steel |
Electro polished housing | 316L Stainless steel | |
Element Operating Conditions | Maximum inlet pressure | 21 MPa (210kgf/cm2) at 20°C |
Maximum differential pressure | 15 MPa (153kgf/cm2) at 20°C | |
Maximum operating temperature | 460°C (Inert gas) | |
Helium Leak Rating | 1 x 10-9 atm cc/sec | |
Surface Finish Interior | ≤ Ra 5μin |
Part No. | A/mm | B/mm | C/mm | D/mm |
---|---|---|---|---|
SF15-04MV | 84 | 155.5 | 22 | 20 |
SF15-04LOK | 73 | 10 | 22 | 20 |
SF50-04MV | 84 | 15.5 | 22 | 20 |
SF50-04LOK | 73 | 10 | 22 | 20 |
SF150-04MV | 84 | 15.5 | 37 | 35 |
SF150-04LOK | 73 | 10 | 37 | 35 |
SF300-04MV | 127 | 15.5 | 37 | 35 |
SF300-04LOK | 116 | 10 | 37 | 35 |
SF300-08MV | 136 | 19 | 37 | 35 |
SF300-08LOK | 122 | 12 | 37 | 35 |