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CMP Machines Pcox 202-203-204
Model Name
Pcox 202
Series
Mass Production
Data
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Manufacturer information
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ALPSITEC

CMP Machines Manufacturer

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Manufacturer
ALPSITEC
Brand
-
SKU
138996
Product Name
CMP Machines Pcox 202-203-204
Model Name
Pcox 202, Pcox 203, Pcox 204
Size
-
Weight
-
Product Details

Advantages

-Price

-2 to 4 polishing modules

-Easy to use and robust.

The Pcox20X range presents a series of modular machines which offers configurations including 2, 3 or 4 polishing modules and is production oriented.

The product characterisics are similar to the Pcox 200S.

 


Specifications

Rack
Wafer diameter <= 200 mm
Rotation speed 15 – 150 rpm
Back pressure 0 – 100 kPa
Pressing force 0 – 3000 N
Scan amplitude 0 – maximum
Scan speed 0 – 0.35 m/s
   
Tray
Diameter 550 mm
Rotation speed 15 – 150 rpm
Temperature 10 – 60°C
Abrasive 0 – 250 ml/min
Conditioner
Tool type brush, disc, diamond ring
Tool diameter 100 – 225 mm
Force 20 – 300 N
Rotation speed 10 – 70 rpm
Scan speed 0 – 0.9 m/s
End point
Module prepared for interfacing with a system for detecting the end of attack DFA2 system from Alpsitec or other system.
Power
Head motor 0.75 kW
Platen motor 2.20 kW
Conditioning motor 0.37 kW
Facilities
Voltage 220V Tri or 400V tri
Compressed air 6 bars
Nitrogen 2 bars
DI water 1 bar
Consumption
Electricity 1 – 2 KWH
DI water 100 L/hour
Vaccum internal vacuum pump
Dimensions
Width 950 mm
Depth 1190 mm
Height 2480 mm
Weight 1000 kg
Wafer dimension 4’’ to 200 mm
Retrofit kit 4″, 5″, 6″
Option module autoloading cassette 1
ALPSITEC
CMP Machines Manufacturer
Designer and manufacturer of CMP machines Alpsitec, buying activity CMP Steag Electronic Systems (German industrial group) is positioned as a leading manufacturer of machines CMP. The park of the machines installed by his predecessor is mainly composed of laboratories and research centers, institutional or industrial. Evolutionary lines By completing the initial range of Steag machines with the new range of Pcox machines, Alpsitec offers its customers a new way to those offered by our competitors. The intelligent design of our range of machines provides an opportunity for emerging companies and spin-off of large laboratories, equip themselves with machines that evolve with them. High performances Our range of machines, from the small E460 to the production machine polishing PCox 4 modules, is built on the same basic mechanical concepts, which induce the same qualities: – strength – simplicity and speed of implementation – high availability This basic mechanical joint has another advantage: the extreme ease transfer process from one machine to another in our range.
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