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Single Plasma Treatment System
Model Name
Albatross™
Data
-
Manufacturer information
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EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
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Manufacturer
EUGENE TECH
Brand
-
SKU
10924
Product Name
Single Plasma Treatment System
Model Name
Albatross™
Size
-
Weight
-
Product Details

The Albatross™ : Our high density and low electron temperature plasma offers many advantages for plasma surface treatment processes. Our patented, dual rotated ICP plasma antenna technology, surrounding a quartz chamber, provides excellent film uniformity, very clean treatment and wide process range to meet every customer’s needs.

 

Key Features

- Dual Rotated Spiral ICP Antenna Plasma Source

- Quartz Chamber for Metal Contamination Free Process

- High Temperature Process up to 600°C

- High Vacuum Configuration w/Turbo Molecular & Dry Pumps   

 

Benefits

- Damage Free Plasma 

- Lower Particle Generation

- Wide Process Window

- Thick Plasma Oxidation

 

Applications

EUGENE TECH Single Plasma Treatment System Albatross™

EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
EUGENE TECHNOLOGY CO., LTD provides innovative solutions that enable continued scaling of key semiconductor manufacturing processes while traditional semiconductor equipment makers face increasing limitations in the emerging nano technology era.   EUGENE TECHNOLOGY, starting with novel 'Nitride' processes, and soon adding Poly and Oxide steps, became the only company providing 'Single Wafer' diffusion solutions. Our flagship product line, the 'Blue Jay System' has been in volume production on core Front End of Line (FEOL) processes at leading global for 5 years, meeting stringent quality, technology, and productivity requirements. We are also investing heavily in advanced research and development (R&D) to continually expand our 'Diffusion Solution Provider' product offerings.   Launched with our own proprietary technology, we have grown rapidly to become a KOSDAQ-listed company in only 6 years. By following our own unique path, we've built the EUGENE TECHNOLOGY of today on the strength of our employee's conviction and dedication, focus on quality, competence in R&D, and an in depth understanding of industry technology trends.   As a dynamic, young, and growing company, we'll continue to move towards our vision to become a Top 10 global equipment company by expanding our market share aggressively in 2017-8.   EUGENE TECHNOLOGY is committed to pursuing semiconductor industry development with our leading technology, great partnerships with our customers, suppliers, and investors, and with the determination of our people.
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