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Dry Cleaning System
Model Name
Hawk™
Data
-
Manufacturer information
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EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
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Manufacturer
EUGENE TECH
Brand
-
SKU
10926
Product Name
Dry Cleaning System
Model Name
Hawk™
Size
-
Weight
-
Product Details

The Hawk™ is a dry cleaning system for memory and logic device which provides a perfectly clean Si surface for deep contact plug integration and all of the Epi processes including Si, SiGe and III-V materials. 

 

Key Features

- Single Wafer Dry Cleaning Process with Gas Chemicals

- Eugene's Own Dual Rotated Spiral ICP Antenna Plasma Source

- High Radical Density

- Plasma Damage Free

- Wide Range of Process Parameters


Benefits

- Controllable Map, Concave or Convex

- Excellent Uniformity

- Good Coverage at Deep Contact

- High Throughput


Applications

EUGENE TECH Dry Cleaning System Hawk™

EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
EUGENE TECHNOLOGY CO., LTD provides innovative solutions that enable continued scaling of key semiconductor manufacturing processes while traditional semiconductor equipment makers face increasing limitations in the emerging nano technology era.   EUGENE TECHNOLOGY, starting with novel 'Nitride' processes, and soon adding Poly and Oxide steps, became the only company providing 'Single Wafer' diffusion solutions. Our flagship product line, the 'Blue Jay System' has been in volume production on core Front End of Line (FEOL) processes at leading global for 5 years, meeting stringent quality, technology, and productivity requirements. We are also investing heavily in advanced research and development (R&D) to continually expand our 'Diffusion Solution Provider' product offerings.   Launched with our own proprietary technology, we have grown rapidly to become a KOSDAQ-listed company in only 6 years. By following our own unique path, we've built the EUGENE TECHNOLOGY of today on the strength of our employee's conviction and dedication, focus on quality, competence in R&D, and an in depth understanding of industry technology trends.   As a dynamic, young, and growing company, we'll continue to move towards our vision to become a Top 10 global equipment company by expanding our market share aggressively in 2017-8.   EUGENE TECHNOLOGY is committed to pursuing semiconductor industry development with our leading technology, great partnerships with our customers, suppliers, and investors, and with the determination of our people.
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