DLC coating products manufacturer, DFC coating, Hard coating, Thin film analysis equipment, Scratch tester and more
Carbozen - ™ Lab Series can perform high quality coating in lab scale size.
It is able to provide multiple kinds of coating on the product utilizing a glow discharge method.
Specification
Chamber size | Ø500×H250mm |
Deposition rate | 300mm per hour |
Cathode size | Ø300 mm |
Plasma source | Linear ion source, UBM sputter, Cathodic arc |
주요특징
• 개발예산에 맞춰 다양한 옵션 선택 가능 (선택옵션에 따라 가격 조절이 가능)
• 20년 동안 축적해온 양산 코팅 기술로 최적화된 솔루션 제공
• 코팅공정의 설계, 수정이 용이한 전자동 소프트웨어
Product Models
●=Standard / ●=Option
Components | Full Option | PECVD | Sputtering | Metal-ARC | Specifications |
Rotary pump | ● | ● | ● | ● | 4~60 m3/h |
Turbo pump | ● | ● | ● | ● | 200~400 l/s |
Throttl Valve | ● | ● | Blade type | ||
Baratron Gauge | ● | ● | 0.1~1torr | ||
Pressure Controller | ● | ● | Automatic Control | ||
Heater | ● | ● | ● | ● | 400~500℃ |
1 Fold Turntable | ● | ● | 3 Axis Rotation | ||
2 Fold Turntable | ● | ● | ● | ● | 3 Axis Rotation & Revolution |
Sputter DC Power Supply | ● | ● | 2KW DC | ||
Ion Source DC Power Supply | ● | ● | ● | 10KW DC | |
Cathodic Arc Power Supply | ● | ● | 5KW DC | ||
Bias Power Supply | ● | ● | ● | ● | 5KW 350khz |
Cathode Power Supply | ● | ● | AC or RF | ||
4 Inch Sputter Source | ● | ● | Unbalanced Magnetron Sputter | ||
4 Inch Ion Source | ● | ● | ● | ● | Closed drift Type |
3 Inch Cathodic Arc Source | ● | ● | Direct cooling Type |