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Residual Stress Tester
Model Name
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Series
The Film Measure Equipment
Data
Residual Stress Tester
Manufacturer information
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J&L TechDLC coating products manufacturer, DFC coating, Hard coating, Thin film analysis equipment, Scratch tester and more
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Manufacturer
J&L Tech
Brand
-
SKU
55508
Product Name
Residual Stress Tester
Model Name
-
Size
-
Weight
-
Product Details

In case of thin film has compress stress of tensile stress, tester measures deforming rate of the board-thin film complex and calculates the residual stress.

 

Characteristics of RESIDUAL STRESS TESTER

• Automatic control of X-Y axis
• Compute residual stress by usage of thin film's curvature Stoney formula
• (Able to measure of amorphous state)
• Easy to control

 

Precautions

• Measuring test: Circuit board needs to use Si-wafer with 250 ± 15㎛ thickness, length better be 10 times compare to width.
• Thickness of thin film has to be slimmer than 1/50 size of circuit board.

 

Specification of RESIDUAL STRESS TESTER

Range of Curvature 2m ~ 100m
Range of Measurement 60Mpa ~ 10Gpa
Resolution of Measurement 10Mpa
Range of Measurement error < 10%
Length of Maximum Scan 30mm
Stap of Minimum Scan 0.2mm
Thickness of Wafer 100um ~ 800um
Thickness of Coati ng film 0.05um ~ 10um
Scan Stage Stroke 30mm
Scan Stage Resolution 25um
Loading Stage Stroke 140mm
Loading stage Resolution 0.5mm
Speed of Measurement 0.02mm/s
Size of Test Piece 40mm[length] x 4mm[width]
Specification of PSD Sensor 5um
Device Size 500[W] x 500[D] x 500[H] mm
Weight 30kg
Power consumption 150W

J&L TechDLC coating products manufacturer, DFC coating, Hard coating, Thin film analysis equipment, Scratch tester and more
J&L Tech has been leading domestic and international fluid coating market, and became world best plasma company recognized in coating system and thin film analyzing equipment. J&L Tech systemized enable to provide stable coating equipment and service. We provide from main equipment like PECVD, Ion Plating, FCVA, and high-hardness coating like DLC, CrN, TiN, TiAlN which were invented thin film analysis technique with 3-dimensional coating skills to complex functional coatings. Since the initial stage, we have been developing diverse surface coating skills cooperate with KIST, KIMM, KITECH main in our ‘In-house Plasma laboratory’. These missions have became our basis to build plasma coating system and process. Additionally, we offer total solution for related engineering. Plasma coating equipment and measuring equipment for thin film R&D are recognized and being used by laboratories, firms and institutions.
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