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JTEKT KOREA
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Model Name
VF-5700 Series
Series
-
Data
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Manufacturer information
JTEKT KOREADeep Groove Ball Bearings, Angular Contact Ball Bearings, Spherical Roller Bearings, Tapered Roller Bearings, Oil Seals and more
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Manufacturer
JTEKT KOREA
Brand
-
SKU
121307
Product Name
VF - Series
Model Name
VF-5700 Series, VF-5100 Series, VF-1000 Series, VF-4000 Series
Size
-
Weight
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Product Details
VF-5700
| Outer Dimension(mm) | 1250(w) × 3200(D) × 2850(H) |
| Heater | High Power LGO Heater ( Standard Inner Size : Φ550mm) |
| Flat zone Length(mm) | 500 |
| Wafer Size(mm) | 300 |
| Batch Size | 50 Wafers |
| I/O Port | 2 |
| Wafer Transfer | 5 wafers + single wafer |
| Controller | Model VSC1000 |
| Option | Forced-cooling system, N2 load lock, HOST Communication (GEM300), |
Process | Oxidation, Duffusion, LP CVD, Annealing, Polyimide Curing, Nitriding ,Sintering, alloy |
| Applications | Si, SiC, IGBT, Polyimide, Thin Wafer |
VF-5100
| Outer Dimension(mm) | 1000(w) x 1850(D) x 3520(H) (8 Inchx150 Wafers) |
| Heater | LGO Heater |
| Flat zone Length(mm) | 350~960 |
| Wafer Size(mm) | 4~8 inch |
| Batch Size | 150 Wafers |
| I/O Port | 1 |
| Number of Cassette Stock | 4~8 |
| Wafer Transfer | 5 wafers + single wafer |
| Controller | Model VSC1000 |
| Option | Forced-cooling system, N2 load lock, HOST Communication (GEM300), |
| Process | Oxidation, Duffusion, LP CVD, Annealing, Polyimide Curing, Nitriding ,Sintering, alloy |
| Applications | Si, SiC, IGBT, Polyimide, Thin Wafer |
VF-1000
| Outer Dimension(mm) | 1500(w) x 1000(D) x 2100(H) (~8 Inch Standard) |
| Heater | LGO Heater |
| Flat zone Length(mm) | 160-250 |
| Wafer Size(mm) | ~12 inch |
| Batch Size | 25매 |
| Controller | Model 880 |
| Option | Forced-cooling system, N2 load lock |
| Process | Oxidation, Duffusion, LP CVD, Annealing, Polyimide Curing, Nitriding ,Sintering, alloy |
| Applications | Si, SiC, IGBT, Polyimide, Thin Wafer |
VF-4000
| Outer Dimension(mm) | 2000(w) x 2000(D) x 4350(H) |
| Heater | LGO Heater |
| Temperature Range | 200~600℃ |
| Glass Size | 1300x1500 |
| Batch Size | 25~28 Glasses |
| Temperature Uniformity | ≤±3℃ |
| Chamber Material | High Quality Quartz |
| Controller | Model VSC1000 |
| Option | Forced-cooling system, HOST Communication(SECS/GEM) |
| Process | Activation, Anneal, PI Cure ( Flexible OLED ) |
| Applications | ~ G6 |
JTEKT KOREADeep Groove Ball Bearings, Angular Contact Ball Bearings, Spherical Roller Bearings, Tapered Roller Bearings, Oil Seals and more
The main business areas are bearings, steering, driving parts, and machine tool businesses. JTEKT aims to provide battleship, practicality, comfort, energy saving and eco-friendly products and technologies through JTEKT's worldwide network of global technology research institutes. We are making this happen.
In addition, JTEKT is making continuous technological development through tribology, nanotechnology, electrical control, resource development, polishing and heat treatment, etc. In particular, it is making outstanding progress in mechanical technology that enables the manufacture of ultra-precision and high-quality products.