Mask aligner and Spin coater equipment manufacturer
Easy operation & Installation
Handling Substrates of Various sizes
Adopt UV-LED exposure module
UV-LED Life-time is long
specification
Type | Fully manual (Mask Aligner) |
---|---|
Mask size | up to 5" x 5" |
Substrate size | piece to 4" dia |
UV lamp & Power | UV-LED & power supply |
Uniform beam size | 125mm dia |
Beam Uniformity | <±3% |
Beam wavelength | 365nm Only |
365nm Intensity | ~20mW/cm2 |
Alignment accuracy | 1um |
Process resolution | 1um@1um PR thickness with vacuum contact |
Process mode | Soft, Hard, Vacuum contact & Proximity |
Substrate chuck moving | x,y,z & θ |
Options | etc. |