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Remote Plasma Control Valve
Model Name
V41 Series
Series
Special Valves
Data
REMOTE PLASMA CLEANING VALVE
Manufacturer information
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PRESYS

Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more

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Manufacturer
PRESYS
Brand
-
SKU
60340
Product Name
Remote Plasma Control Valve
Model Name
V41 Series
Size
-
Weight
-
Product Details

Application 
- High vacuum process 
- All CVD process (including MO, PE, HDP, LP and AP)
- Photovoltaic and semiconductor application
 
 
Features 
- Pneumatic actuator
- Rated for 1 million cycles
- Particle free
- Easy maintenance
 
 
Options 
- Various o-ring compounds (Kalrez®, Chemraz®, etc.) 
 

PRESYS Remote Plasma Control Valve V41 Series



Pressure range

1 x 10-8 mbar to 1.5 bar

Leak rate : body, seat

< 1 x 10-8 mbar.ℓ/s

Differential pressure on the gate

 ≤ 1.5 bar in either direction

Material

Valve body, Bonnet seal, Blade

AL6061

Valve actuator

AL6061

Seal material

FFKM(Chemrez®)

Temperature

Valve body

150℃

Valve actuator / Sensor

100℃ / 60℃

Operation

Double acting

Cycle until first service

1 million

Position sensor

SMC (D-A93)



PRESYS
Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more
The engineering staff of Presys, Inc. has been incessantly conducted researches based on the core basic technology that is required in the high-tech simeconductor industry. With a sense of mission as "Need Company," the staff has been creating a new concept based on high-degree vacuum system and green growth technology in order to meet New Millennium customers' expectaitons. With this base technology, our company developed and produced the new concept of product processing technology to become a compnay that fits well to the country's title of "the world's best semiconductor device and FPD production. Also, we are doing our best efforts to expand the new growth engine industry. We promise to assemble our accumulated Know-How and Innovative Venture spirit in order to provide satisfactory customer support and to invest consistently on R&D until our company develops into one that holds the world's best technology and realizes the next generation World Best. I would like to return thatnks to our customers and affiliated companies and ask for further support.
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