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BLUEICE SPM
Model Name
BLUEICE SPM
Series
Semiconductor Equipment
Data
-
Manufacturer information
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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer

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Manufacturer
System Engineering Mega Solution
Brand
-
SKU
28945
Product Name
BLUEICE SPM
Model Name
BLUEICE SPM
Size
-
Weight
-
Product Details

Overview

The 300mm single wafer processing equipment that is used for post CMP clean, PR strip, ashingless PR strip and metal removal processes.


Feature

Process Performance

- High Temperature SPM Process over 150℃
- PR Strip, Post CMP Clean, Metal Clean and etc.

Productivity / Hardware

- Contamination Free Clean by NIC Bowl
- H2SO4 Recycle System
- Energy Efficiency Rating : Class 1

System Engineering Mega Solution
Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
SEMES, Korea’s leading semiconductor and display manufacturing equipment company, celebrates its 22nd anniversary this year. Back in 1993, the domestic semiconductor equipment industry was almost non-existent. Seeing an opportunity, SEMES focused on developing differentiated core semiconductor equipment technologies, which has matured us to compete in the global market. Thanks to our dedication to develop distinctive technological skills and manufacturing competitiveness, our goal now is becoming the first Korean company within the global top 5 of this industry. In addition, we have continued to create efficient and comfortable working environments based on a compliance management culture, which ensures the fairness and transparency of our business activities. Once again, I would like to thank everyone who has supported us throughout the years of business. In the future, SEMES will continue to focus on improving the quality of our products and services for our customers.
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