Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Overview
The equipment for the Coating, Drying and Developing processes during display panel manufacturing.
It has an exceptional panel transfer ability and high coating uniformity.
Feature
Enhanced drying capability
- Air knife for uniform drying
Temperature uniformity
- Implementation of uniform temperature has increased with the adoption of the 16 minute heater-plate
- Double layered design to minimize footprint and tool equipped with a top slide cover
Improved panel transport
- Increased return shaft by 5 degrees
- Self transport system for particle and fume prevention