Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Overview
IRIS 12B is the 300mm single wafer processing equipment that can process front side and back side etching, stripping, bevel treatment, cleaning, rinsing and drying.
Feature
Dual stack chamber
- Implemented a 2 story structure design to reduce footprint and improved chemical recycling to reduce overall CoO
High throughput 370WPH
- SEMES’ high speed transfer robot system and wafer handling scheduler increased production speed up to 370WPH
RAMs for CoO (Reliability Availability Maintainability for Cost of Ownership)
- Multi processing chamber unit with 2 chemical nozzles plus 3 optional nozzles adds versatility
- Consisted with sonic, aerosol, backside, bevel etching, IPA and optional nozzles for <45nm process.