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MICHELAN O2
Model Name
MICHELAN O2
Series
Semiconductor Equipment
Data
-
Manufacturer information
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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer

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Manufacturer
System Engineering Mega Solution
Brand
-
SKU
28949
Product Name
MICHELAN O2
Model Name
MICHELAN O2
Size
-
Weight
-
Product Details

Overview

CCP Type Plasma Etcher for HARC Etching and Via/Dama Etching Process 


Feature

Process performance

- Specialized Critical Etch Process
  : DRAM, Flash, 3D NAND and Logic Applications
- Low Particle / Verticle Etching
- High Etch Rate / High Mask Selectivity 
- Precise CD and CD Uniformity Control
- Low Micro-loading Effect

Productivity / Hardware

- Cluster Transfer Module : Max. 6 Chambers
- RF Sync Pulse Function : High Aspect Ratio
- Radial Uniformity Control HW : Gas and Temperature
- Low C.o.O / Long MTBC
- High Throughput

System Engineering Mega Solution
Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
SEMES, Korea’s leading semiconductor and display manufacturing equipment company, celebrates its 22nd anniversary this year. Back in 1993, the domestic semiconductor equipment industry was almost non-existent. Seeing an opportunity, SEMES focused on developing differentiated core semiconductor equipment technologies, which has matured us to compete in the global market. Thanks to our dedication to develop distinctive technological skills and manufacturing competitiveness, our goal now is becoming the first Korean company within the global top 5 of this industry. In addition, we have continued to create efficient and comfortable working environments based on a compliance management culture, which ensures the fairness and transparency of our business activities. Once again, I would like to thank everyone who has supported us throughout the years of business. In the future, SEMES will continue to focus on improving the quality of our products and services for our customers.
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