Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Overview
Storage and transferring system for Reticle and Pod with N2 Purge System
Feature
- High Capacity (RSP-150, 6”Reticle)
. Reticle Pod : 68 EA
. Bare Reticle : 1,452 EA
- High Clean Class System
. Pod area : SEC Class 1000
. Bare area : SEC Class 1
- Transfer Interface : OHT