Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell
Overview
Numerous Be Lenses are manufactured with one module, so the size of collimation is adjusted by adding or removing individual modules to and from the optical axis
The Be Lens modules are remotely controlled
Specifications
PART | Parameter | Specification |
Pitch | Range(mrad) | ±50 |
Resolution(μrad) | 1 | |
Roll | Range(mrad) | ±50 |
Resolution(μrad) | 1 | |
Yaw | Range(mrad) | ±14 |
Resolution(μrad) | 2 | |
Chamber X | Range(mm) | ±25 |
Resolution(µm) | 0.1 | |
Chamber Z | Range(mm) | ±25 |
Resolution(µm) | 0.1 |