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Vacuum Stage
Model Name
VAX-0000-A
Series
Precision Stage
Data
-
Manufacturer information
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Vactron

Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell

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Manufacturer
Vactron
Brand
-
SKU
33692
Product Name
Vacuum Stage
Model Name
VAX-0000-A, VAZ-0000-A
Size
-
Weight
-
Product Details

OVERVIEW

X-axis(±15), Y-axis (±15)
Pitch(±2.5°), Roll((±2.5°)

SPECIFICATIONS

Model No. VAX-0000-A VAZ-0000-A
Table size (mm) 000 * 000 000 * 000
Motion range (mm) 00 00
Resolution (µm) 0.00(Half Step) 0.00(Half Step)
Accuracy (µm) 0 0
Repeatability (µm) ±0 ±0
Load capacity 000kgf 000kgf
Guide mechanism Cross roller Guide Cross roller Guide
Lead mechanism Ball Screw,Lead 0mm Ball Screw,Lead 0mm
Encoder    
Drive type 5-ph, Stepping  motor 5-ph, Stepping motor
Vacuum Pressure 5 * 10E-8torr 5 * 10E-8torr

Vactron
Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell
VACTRON specialize in engineering and manufacturing, Providing ultra precise components and systems, including ultra high vacuum(UHV) systems, since 1994. We supply the total solution for precision vacuum systems for many companies and laboratories in korea, such as Po-hang Accelerator Laboratory.  We provide our products worldwide. We are growing as a world-class company in the field of Synchrotron Beamlines and Ultra High Vacuum Appications based on accumulated technological expertise and price competitiveness. 
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