Atomic Layer Deposition(ALD)
is a powerful thin film deposition innovator based on the sequential reaction of gas precursors at a surface.
ㆍPrecise atomic level thickness and composition control
ㆍExcellent conformality for deep trench with high aspect ratio and complex 3D nano- & micro-structures
ㆍExcellent thickness uniformity in large area substrates
ㆍLower process temperature than CVD
ㆍAvailable Materials : Metal, Metal oxide, Metal nitride, Metal sulfide, Laminate, mixed materials
ㆍApplication fields : Semiconductor, Display, Solar cell, LED, MEMS, Optical-, Bio-, Nano- and Flexible devices